Jenoptik at SEMICON WEST 2010: Dedicated microoptical solutions for Semiconductor & Flat Panel Display Equipment Industry

CaF2 –Gaussian Diffuser (PresseBox) (Jena, ) Jenoptik has expanded its process capabilities in CaF2 (single crystal Calcium Fluoride) for applications in the semiconductor market. These solutions, along with the full range of custom microoptics, will be presented in San Francisco (CA), USA.

Highly efficient microoptics from DUV to IR

Due to high transparency and excellent lifetime stability, CaF2 is the material of choice for excimer lasers used in the lithography market as well as other high power applications in the deep ultra violet (DUV). The Microoptics business unit of Jenoptik's Optical Systems division strengthens its position as world leader in DUV microoptics by offering custom specific CaF2 microoptics.

The complete product range of CaF2 microoptics includes diffractive and refractive solutions such as gaussian homogenizers, refractive fly's eye homogenizers, diffractive lenses, lens arrays for fill factor enhancement, as well as DOEs for mask inspection and illumination. Our capabilities are ideal for DUV applications in the semiconductor & flat panel display industry, which typically require excellent uniformity, efficiency and high power.

Due to our flexible technology base, the CaF2 microoptical solutions can be designed with significantly reduced complexity. Our refractive homogenizers and fly's eye lens arrays can be designed with rectangular apertures, which reduces the number of required elements to homogenize an anamorphic or rectangular field. We can provide these solutions using substrates from 75-150 mm diameter and thicknesses from 0.5 - 6 mm thick.

Ask the experts and visit Jenoptik at Semicon West 2010, San Francisco from July 13 - 15, 2010 in South Hall, Booth 2413.

About Microoptics business unit

The Microoptics business unit offers a complete portfolio of microoptical products featuring excellent performance. Based on a broad range of technology skills, customers can choose from a variety of options - from the design and flexible rapid prototyping to the manufacturing of small and large batches of refractive, diffractive or hybrid microoptical solutions.

Capabilities to handle a huge variety of materials including CaF2, fused silica, GaP, ZnSe, glass, Ge, Silicon, Sapphire and plastics enable us to cover a broad range of wavelengths from DUV to IR.

We also provide the platform to successfully address a diversity of applications for semiconductor & flat panel display and laser materials processing equipment as well as life science, defense and civil system applications.

Where new and highly efficient solutions are required, OEMs and system integrators can rely on Jenoptik's Microoptics business unit. With fabrication sites in Germany and in the USA and sales representatives worldwide, we are globally and conveniently positioned to serve our customers.

About Semiconductor & Flat Panel Display Equipment Market

Jenoptik is a leading provider of customized optical and microoptical systems, modules and components that serve the entire wavelength range from EUV and DUV to the infrared. Customers in the semiconductor and flat panel display equipment industry benefit from our design and solution competence. Our portfolio consists of cutting edge technologies for optics and microoptics manufacturing. Our experience with lifetime performance at high laser powers, photo contamination in the UV, solutions for the homogenization of light as well as UVstable coatings unexcelled.

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JENOPTIK-KONZERN
Carl-Zeiß-Straße 1
D-07743 Jena
Ines Schindler
JENOPTIK Optical Systems GmbH / Optische Systeme

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